Effect of Plasma Excitation Power on the SiOxCyHz/TiOx Nanocomposite

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Autor(es): dc.contributorUniversidade Estadual Paulista (UNESP)-
Autor(es): dc.contributorBahir Dar University-
Autor(es): dc.creatorGetnet, Tsegaye Gashaw-
Autor(es): dc.creatorCruz, Nilson C.-
Autor(es): dc.creatorRangel, Elidiane Cipriano-
Data de aceite: dc.date.accessioned2025-08-21T15:43:36Z-
Data de disponibilização: dc.date.available2025-08-21T15:43:36Z-
Data de envio: dc.date.issued2025-04-29-
Data de envio: dc.date.issued2023-07-01-
Fonte completa do material: dc.identifierhttp://dx.doi.org/10.3390/mi14071463-
Fonte completa do material: dc.identifierhttps://hdl.handle.net/11449/309321-
Fonte: dc.identifier.urihttp://educapes.capes.gov.br/handle/11449/309321-
Descrição: dc.descriptionTitanium dioxide has attracted a great deal of attention in the field of environmental purification due to its photocatalytic activity under ultraviolet light. Photocatalytic efficiency and the energy required to initiate the process remain the drawbacks that hinder the widespread adoption of the process. Consistently with this, it is proposed here the polymerization of hexamethyldisiloxane fragments simultaneously to TiO2 sputtering for the production of thin films in low-pressure plasma. The effect of plasma excitation power on the molecular structure and chemical composition of the films was evaluated by infrared spectroscopy. Wettability and surface energy were assessed by a sessile drop technique, using deionized water and diiodomethane. The morphology and elemental composition of the films were determined using scanning electron microscopy and energy dispersive spectroscopy, respectively. The thickness and roughness of the resulting films were measured using profilometry. Organosilicon-to-silica films, with different properties, were deposited by combining both deposition processes. Titanium was detected from the structures fabricated by the hybrid method. It has been observed that the proportion of titanium and particles incorporated into silicon-based matrices depends on the plasma excitation power. In general, a decrease in film thickness with increasing power has been observed. The presence of Ti in the plasma atmosphere alters the plasma deposition mechanism, affecting film deposition rate, roughness, and wettability. An interpretation of the excitation power dependence on the plasma activation level and sputtering yield is proposed. The methodology developed here will encourage researchers to create TiO2 films on a range of substrates for their prospective use as sensor electrodes, water and air purification systems, and biocompatible materials.-
Descrição: dc.descriptionLaboratory of Technological Plasmas Institute of Science and Technology São Paulo State University (UNESP), SP-
Descrição: dc.descriptionDepartment of Chemistry College of Science Bahir Dar University, Bahir Dar P.O. Box 79-
Descrição: dc.descriptionLaboratory of Technological Plasmas Institute of Science and Technology São Paulo State University (UNESP), SP-
Idioma: dc.languageen-
Relação: dc.relationMicromachines-
???dc.source???: dc.sourceScopus-
Palavras-chave: dc.subjectHMDSO-
Palavras-chave: dc.subjectPECVD-
Palavras-chave: dc.subjectplasma-
Palavras-chave: dc.subjectTiO2 nanoparticle-
Título: dc.titleEffect of Plasma Excitation Power on the SiOxCyHz/TiOx Nanocomposite-
Tipo de arquivo: dc.typelivro digital-
Aparece nas coleções:Repositório Institucional - Unesp

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