Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method

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MetadadosDescriçãoIdioma
Autor(es): dc.contributorUniversidade Estadual Paulista (UNESP)-
Autor(es): dc.creatorGonzález, A. H.M.-
Autor(es): dc.creatorSimões, A. Z.-
Autor(es): dc.creatorZaghete, M. A.-
Autor(es): dc.creatorVarela, J. A.-
Data de aceite: dc.date.accessioned2025-08-21T21:24:03Z-
Data de disponibilização: dc.date.available2025-08-21T21:24:03Z-
Data de envio: dc.date.issued2022-04-29-
Data de envio: dc.date.issued2022-04-29-
Data de envio: dc.date.issued2004-05-10-
Fonte completa do material: dc.identifierhttp://hdl.handle.net/11449/231763-
Fonte: dc.identifier.urihttp://educapes.capes.gov.br/handle/11449/231763-
Descrição: dc.descriptionLithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500°C for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm3/min leads to LiTaO 3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow.-
Descrição: dc.descriptionUniversidade Estadual Paulista, Rua Prof. Francisco Degni s/n, Araraquara CEP 14801-970 Sao Paulo-
Descrição: dc.descriptionUniversidade Estadual Paulista, Rua Prof. Francisco Degni s/n, Araraquara CEP 14801-970 Sao Paulo-
Formato: dc.format69-76-
Idioma: dc.languageen-
Relação: dc.relationCeramic Transactions-
???dc.source???: dc.sourceScopus-
Título: dc.titleEffect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method-
Tipo de arquivo: dc.typeaula digital-
Aparece nas coleções:Repositório Institucional - Unesp

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