The effect of anodization parameters on the aluminum oxide dielectric layer of thin-film transistors

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MetadadosDescriçãoIdioma
Autor(es): dc.contributorUniversidade Estadual Paulista (Unesp)-
Autor(es): dc.contributorBangor University-
Autor(es): dc.creatorGomes, Tiago C. [UNESP]-
Autor(es): dc.creatorKumar, Dinesh-
Autor(es): dc.creatorAlves, Neri [UNESP]-
Autor(es): dc.creatorKettle, Jeff-
Autor(es): dc.creatorFugikawa-Santos, Lucas [UNESP]-
Data de aceite: dc.date.accessioned2022-02-22T00:34:42Z-
Data de disponibilização: dc.date.available2022-02-22T00:34:42Z-
Data de envio: dc.date.issued2020-12-11-
Data de envio: dc.date.issued2020-12-11-
Data de envio: dc.date.issued2020-05-01-
Fonte completa do material: dc.identifierhttp://dx.doi.org/10.3791/60798-
Fonte completa do material: dc.identifierhttp://hdl.handle.net/11449/201853-
Fonte: dc.identifier.urihttp://educapes.capes.gov.br/handle/11449/201853-
Descrição: dc.descriptionAluminum-oxide (Al2O3) is a low cost, easily processable and high dielectric constant insulating material that is particularly appropriate for use as the dielectric layer of thin-film transistors (TFTs). Growth of aluminum-oxide layers from anodization of metallic aluminum films is greatly advantageous when compared to sophisticated processes such as atomic layer deposition (ALD) or deposition methods that demand relatively high temperatures (above 300 °C) such as aqueous combustion or spray-pyrolysis. However, the electrical properties of the transistors are highly dependent on the presence of defects and localized states at the semiconductor/dielectric interface, which are strongly affected by the manufacturing parameters of the anodized dielectric layer. To determine how several fabrication parameters influence the device performance without performing all possible combination of factors, we used a reduced factorial analysis based on a Plackett-Burman design of experiments (DOE). The choice of this DOE permits the use of only 12 experimental runs of combinations of factors (instead of all 256 possibilities) to obtain the optimized device performance. The ranking of the factors by the effect on device responses such as the TFT mobility is possible by applying analysis of variance (ANOVA) to the obtained results.-
Descrição: dc.descriptionUniversidade Estadual Paulista-
Descrição: dc.descriptionFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)-
Descrição: dc.descriptionSchool of Technology and Sciences São Paulo State University-UNESP-
Descrição: dc.descriptionScholl of Electronic Engineering Bangor University-
Descrição: dc.descriptionInstitute of Geosciences and Exact Sciences São Paulo State University-UNESP-
Descrição: dc.descriptionSchool of Technology and Sciences São Paulo State University-UNESP-
Descrição: dc.descriptionInstitute of Geosciences and Exact Sciences São Paulo State University-UNESP-
Descrição: dc.descriptionFAPESP: 14/13904-8-
Descrição: dc.descriptionFAPESP: 16/03484-7-
Descrição: dc.descriptionFAPESP: 19/01671-2-
Descrição: dc.descriptionFAPESP: 19/05620-3-
Descrição: dc.descriptionFAPESP: 19/08019-9-
Formato: dc.format1-8-
Idioma: dc.languageen-
Relação: dc.relationJournal of Visualized Experiments-
???dc.source???: dc.sourceScopus-
Palavras-chave: dc.subjectAluminum oxide-
Palavras-chave: dc.subjectAnodization-
Palavras-chave: dc.subjectANOVA-
Palavras-chave: dc.subjectChemistry-
Palavras-chave: dc.subjectDielectric layer-
Palavras-chave: dc.subjectIssue 159-
Palavras-chave: dc.subjectThin-film transistor-
Palavras-chave: dc.subjectZinc oxide-
Título: dc.titleThe effect of anodization parameters on the aluminum oxide dielectric layer of thin-film transistors-
Tipo de arquivo: dc.typelivro digital-
Aparece nas coleções:Repositório Institucional - Unesp

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