New Improved Version of J(1)... J(4) Interferometry Method and its Application to Nanometric Vibration Measurements

Registro completo de metadados
MetadadosDescriçãoIdioma
Autor(es): dc.contributorUniversidade Estadual Paulista (Unesp)-
Autor(es): dc.contributorUniversidade de São Paulo (USP)-
Autor(es): dc.creatorPereira, Fernando da Cruz [UNESP]-
Autor(es): dc.creatorGaleti, Jose Henrique [UNESP]-
Autor(es): dc.creatorHiguti, Ricardo Tokio [UNESP]-
Autor(es): dc.creatorKitano, Claudio [UNESP]-
Autor(es): dc.creatorNelli Silva, Emilio Carlos-
Autor(es): dc.creatorIEEE-
Data de aceite: dc.date.accessioned2022-02-22T00:08:26Z-
Data de disponibilização: dc.date.available2022-02-22T00:08:26Z-
Data de envio: dc.date.issued2020-12-09-
Data de envio: dc.date.issued2020-12-09-
Data de envio: dc.date.issued2013-01-01-
Fonte completa do material: dc.identifierhttp://hdl.handle.net/11449/196086-
Fonte: dc.identifier.urihttp://educapes.capes.gov.br/handle/11449/196086-
Descrição: dc.descriptionPiezoelectric ceramics, such as PZT, can generate subnanometric displacements, but in order to generate multi-micrometric displacements, they should be either driven by high electric voltages (hundreds of volts), or operate at a mechanical resonant frequency (in narrow band), or have large dimensions (tens of centimeters). A piezoelectric flextensional actuator (PFA) is a device with small dimensions that can be driven by reduced voltages and can operate in the nano-and micro scales. Interferometric techniques are very adequate for the characterization of these devices, because there is no mechanical contact in the measurement process, and it has high sensitivity, bandwidth and dynamic range. A low cost open-loop homodyne Michelson interferometer is utilized in this work to experimentally detect the nanovibrations of PFAs, based on the spectral analysis of the interferometric signal. By employing the well known J(1)...J(4) phase demodulation method, a new and improved version is proposed, which presents the following characteristics: is direct, self-consistent, is immune to fading, and does not present phase ambiguity problems. The proposed method has resolution that is similar to the modified J(1)...J(4) method (0.18 rad); however, differently from the former, its dynamic range is 20% larger, does not demand Bessel functions algebraic sign correction algorithms and there are no singularities when the static phase shift between the interferometer arms is equal to an integer multiple of pi/2 rad. Electronic noise and random phase drifts due to ambient perturbations are taken into account in the analysis of the method. The PFA nanopositioner characterization was based on the analysis of linearity between the applied voltage and the resulting displacement, on the displacement frequency response and determination of main resonance frequencies.-
Descrição: dc.descriptionUNESP, Fac Engn Ilha Solteira, Dept Elect Engn, Ilha Solteira, SP, Brazil-
Descrição: dc.descriptionEPUSP, Dept Mechatron & Mech Syst Engn, Sao Paulo, SP, Brazil-
Descrição: dc.descriptionUNESP, Fac Engn Ilha Solteira, Dept Elect Engn, Ilha Solteira, SP, Brazil-
Formato: dc.format5-
Idioma: dc.languageen-
Publicador: dc.publisherIeee-
Relação: dc.relation2013 Sbmo/ieee Mtt-s International Microwave & Optoelectronics Conference (imoc)-
???dc.source???: dc.sourceWeb of Science-
Palavras-chave: dc.subjectinterferometry-
Palavras-chave: dc.subjectoptical phase measurements-
Palavras-chave: dc.subjectnano displacements-
Palavras-chave: dc.subjectflextensional piezoelectric actuators-
Título: dc.titleNew Improved Version of J(1)... J(4) Interferometry Method and its Application to Nanometric Vibration Measurements-
Aparece nas coleções:Repositório Institucional - Unesp

Não existem arquivos associados a este item.