Influence of spray-pyrolysis deposition parameters on the electrical properties of aluminium zinc oxides thin films

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Autor(es): dc.contributorUniversidade Estadual Paulista (UNESP)-
Autor(es): dc.creatorMartins, Denis E.-
Autor(es): dc.creatorGozzi, Giovani-
Autor(es): dc.creatorSantos, Lucas Fugikawa-
Data de aceite: dc.date.accessioned2021-03-11T00:57:07Z-
Data de disponibilização: dc.date.available2021-03-11T00:57:07Z-
Data de envio: dc.date.issued2018-12-11-
Data de envio: dc.date.issued2018-12-11-
Data de envio: dc.date.issued2018-01-01-
Fonte completa do material: dc.identifierhttp://dx.doi.org/10.1557/adv.2018.121-
Fonte completa do material: dc.identifierhttp://hdl.handle.net/11449/179775-
Fonte: dc.identifier.urihttp://educapes.capes.gov.br/handle/11449/179775-
Descrição: dc.descriptionCoordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)-
Descrição: dc.descriptionFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)-
Descrição: dc.descriptionProcesso FAPESP: 2008/57706-4-
Descrição: dc.descriptionProcesso FAPESP: 2013/24461-7-
Descrição: dc.descriptionProcesso FAPESP: 2017/22018-0-
Descrição: dc.descriptionIn the current work, we evaluate the influence of the processing parameters on the electrical properties of aluminium zinc oxide (AZO) thin films produced by airbrush spray-pyrolysis deposition technique. Spray-deposited AZO thin-films were produced with Al:Zn molar ratios varying from 0 % (pure ZnO) up to 30 %, using aluminium acetate and zinc acetate as organic precursors and water as solvent. Thermogravimetric analysis (TGA) and infrared spectroscopy (FTIR-ATR) were used to monitor the metal-oxide formation from the organic precursors as a function of the temperature. The results show that a temperature of 400°C is necessary to completely degrade the organic phase and to obtain the desired inorganic metal-oxides films. The electrical properties of the TMOs were evaluated by d.c. current-voltage (I-V) analysis using planar thermally evaporated Al electrodes on top of the TMO layer, with different aspect ratios (1/18, 2/9, 5/13, 5/9 and 8/9). The lowest sheet resistance was obtained for AZO films at a molar Al concentration of 5 %. We also observed that, after carrying out a post-annealing treatment (30 mbar, 150°C) the samples presented a decrease on the sheet resistance superior to 60 %, in comparison to the samples before the treatment.-
Formato: dc.format283-289-
Idioma: dc.languageen-
Relação: dc.relationMRS Advances-
Direitos: dc.rightsopenAccess-
Palavras-chave: dc.subjectoxide-
Palavras-chave: dc.subjectspray pyrolysis-
Palavras-chave: dc.subjectthin film-
Título: dc.titleInfluence of spray-pyrolysis deposition parameters on the electrical properties of aluminium zinc oxides thin films-
Aparece nas coleções:Repositório Institucional - Unesp

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