Deposition of thin films using argon/acetylene atmospheric pressure plasma jet

Registro completo de metadados
MetadadosDescriçãoIdioma
Autor(es): dc.contributorUniversidade Estadual Paulista (UNESP)-
Autor(es): dc.creatorRicci Castro, Alonso H.-
Autor(es): dc.creatorKodaira, Felipe V.P.-
Autor(es): dc.creatorPrysiazhnyi, Vadym-
Autor(es): dc.creatorMota, Rogerio P.-
Autor(es): dc.creatorKostov, Konstantin G.-
Data de aceite: dc.date.accessioned2021-03-11T00:31:10Z-
Data de disponibilização: dc.date.available2021-03-11T00:31:10Z-
Data de envio: dc.date.issued2018-12-11-
Data de envio: dc.date.issued2018-12-11-
Data de envio: dc.date.issued2017-02-25-
Fonte completa do material: dc.identifierhttp://dx.doi.org/10.1016/j.surfcoat.2016.07.036-
Fonte completa do material: dc.identifierhttp://hdl.handle.net/11449/169147-
Fonte: dc.identifier.urihttp://educapes.capes.gov.br/handle/11449/169147-
Descrição: dc.descriptionFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)-
Descrição: dc.descriptionConselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)-
Descrição: dc.descriptionProcesso FAPESP: 2013/06732-3-
Descrição: dc.descriptionCNPq: 470995/2013-0-
Descrição: dc.descriptionAtmospheric pressure plasma jet was used to deposit polymer films from argon/air/acetylene mixture. Depending on the gas composition, three modes of operation were observed and characterized. The film deposited by a stationary jet had a circular shape with area (where thickness was almost constant) about the nozzle inner diameter. The deposition rate of stationary jet decreased with the time: a film of 2 μm was obtained after the first two minutes, while in the next two minutes only 1.3 μm film was deposited. The plasma polymers were characterized by infrared spectroscopy, where variety of C–H and few C–O bonds were detected. By using a linear displacement system, we obtained homogeneous deposition over a larger area with deposition rate of about 330 nm/min, showing the potential of such plasma jet system for large-scale depositions.-
Formato: dc.format13-18-
Idioma: dc.languageen-
Relação: dc.relationSurface and Coatings Technology-
Relação: dc.relation0,928-
Direitos: dc.rightsopenAccess-
Palavras-chave: dc.subjectAcetylene-
Palavras-chave: dc.subjectAtmospheric pressure plasma-
Palavras-chave: dc.subjectPlasma jet-
Palavras-chave: dc.subjectPlasma polymers-
Título: dc.titleDeposition of thin films using argon/acetylene atmospheric pressure plasma jet-
Tipo de arquivo: dc.typelivro digital-
Aparece nas coleções:Repositório Institucional - Unesp

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